CAJ | 학술논문

为研制可用于粒子加速器等大科学工程的高精度静力水准传感器，结合国内电容微位移测量技术，完成厚膜陶瓷电容的结构设计。针对参数设计，采用正交实验法和Ansoft Maxwell有限元仿真软件的优化方法，完成了电容传感器的制备及样机的测试。测试实验结果表明传感器具有2．6085％的线性度。
위연제가용우입자가속기등대과학공정적고정도정력수준전감기，결합국내전용미위이측량기술，완성후막도자전용적결구설계。침대삼수설계，채용정교실험법화Ansoft Maxwell유한원방진연건적우화방법，완성료전용전감기적제비급양궤적측시。측시실험결과표명전감기구유2．6085％적선성도。
In order to develop high precision hydrostatic levelling sensor which can be used in particle accelerator or other science projects,a capacitor with thick film ceramic structure has been designed combined with the internal capacitive micro-displacement measuring technology.The optimal parameters are designed using orthogonal experiment method and finite element simulation by the Ansoft Maxwell software.Then a capacitive sensor is developed and tested.The test shows that the sensor has a linearity of 2.608 5%.