CAJ | 학술논문

设计了一种热致驱动MEMS可变电容器，其主要结构由固定于衬底的下极板和可上下活动的上极板组成；上极板由四个对称结构的热驱动器驱动，每个热驱动器主要包括两根冷臂和两根加热臂。通过输入电压，热驱动器发生形变，带动电容器的上极板向上运动，从而使电容值减小。有限元方法模拟结果表明：在4V驱动电压下，加热臂长为150μm时，电容值变为原先的0.3倍；而加热臂长为300μm时，电容值只有原先的1/10。
설계료일충열치구동MEMS가변전용기，기주요결구유고정우츤저적하겁판화가상하활동적상겁판조성；상겁판유사개대칭결구적열구동기구동，매개열구동기주요포괄량근랭비화량근가열비。통과수입전압，열구동기발생형변，대동전용기적상겁판향상운동，종이사전용치감소。유한원방법모의결과표명：재4V구동전압하，가열비장위150μm시，전용치변위원선적0.3배；이가열비장위300μm시，전용치지유원선적1/10。
A Micro Electro Mechanical Systems (MEMS) thermal variable capacitor has been designed and ana-lyzed. Its lower capacitor plate is fixed on the substrate while the upper plate connected by four thermal micro actuators can move up or down depending on the thermal stimulation. Each actuator is composed of two cold arms and two hot arms. The capacitance decreases rapidly resulting from the deformation of the thermal actuators un-der the applied voltage. The simulation of finite element method shows that driven by 4 V, the capacitance value decreases to its 0.3 fold when the hot arms are 150 μm in length,and that it reduces to its 0.1 fold when the hot arms are 300μm long.