CAJ | 학술논문

为精确检测非透明微纳尺寸零件的曲率半径，提出一种以零件的带标尺数字图像为分析对象，对提取的零件轮廓边缘进行最小二乘曲线拟合和曲率半径计算的方法。采用改进的中值滤波算法和直方图均衡化预处理微型金刚石颗粒的扫描电镜图像，通过Canny算子检测到零件轮廓边缘后，利用高阶非线性多项式函数拟合轮廓采样坐标点，并结合图像度量标尺得到了零件的实际曲率半径。误差分析结果表明，在观测倍率为1200、轮廓采样点数量为80、拟合曲线阶次为20时，新方法对金刚石颗粒的曲率半径测量误差不超过10%，具有较高的测量精度和工程实用价值。
위정학검측비투명미납척촌령건적곡솔반경，제출일충이령건적대표척수자도상위분석대상，대제취적령건륜곽변연진행최소이승곡선의합화곡솔반경계산적방법。채용개진적중치려파산법화직방도균형화예처리미형금강석과립적소묘전경도상，통과Canny산자검측도령건륜곽변연후，이용고계비선성다항식함수의합륜곽채양좌표점，병결합도상도량표척득도료령건적실제곡솔반경。오차분석결과표명，재관측배솔위1200、륜곽채양점수량위80、의합곡선계차위20시，신방법대금강석과립적곡솔반경측량오차불초과10%，구유교고적측량정도화공정실용개치。
To acquire the radius of curvature ( ROC) for opaque micro-nano components with high precision, a new technology was introduced in the research, according to the digital image with measuring scale of the investigated subject, and ROC was calculated after the contour edge detection and curve fitting based on the least square law. The modified median filtering was presented to pre-process scanning electron microscope ( SEM) images of the ex-perimental diamond particle, together with the histogram equalization method. Then, the nonlinear polynomial with high order was used to fit the sampling points on the contour edge of the diamond particle detected by the Canny edge detection operator. Further, the actual ROC of the components was calculated combining with the measuring scale on SEM image. The measuring error analysis shows that the deviation of the actual value using this technology is less than 10% for the diamond particle, and as the magnification rate of SEM, the amount of sampling points on contour line and the order of fitting model are 1 200, 80 and 20 respectively, which indicates a high measuring preci-sion and application value.