CAJ | 학술논문

以异丙醇、乙二醇、乙二醇甲醚和乙二醇乙醚4种有机物作为溶剂，采用溶胶-凝胶工艺在Si衬底上制备了钛酸锶钡（BST ）薄膜。利用分光光度计、XRD、SEM等手段对不同溶剂溶胶的透光率和BST薄膜的结构、形貌进行了表征，从溶胶-凝胶转变速度和制备的薄膜结晶质量等方面研究了溶剂对溶胶-凝胶法制备薄膜的影响。研究结果表明：用乙二醇乙醚为溶剂，经过1～3 d陈化后，BS T 薄膜质量较好；在溶胶-凝胶法制备薄膜中，选用黏度小、沸点高、蒸发热大的溶剂有利于形成致密度较高的薄膜。
이이병순、을이순、을이순갑미화을이순을미4충유궤물작위용제，채용용효-응효공예재Si츤저상제비료태산송패（BST ）박막。이용분광광도계、XRD、SEM등수단대불동용제용효적투광솔화BST박막적결구、형모진행료표정，종용효-응효전변속도화제비적박막결정질량등방면연구료용제대용효-응효법제비박막적영향。연구결과표명：용을이순을미위용제，경과1～3 d진화후，BS T 박막질량교호；재용효-응효법제비박막중，선용점도소、비점고、증발열대적용제유리우형성치밀도교고적박막。
The barium strontium titanate (BST ) thin films were prepared on Si substrates by sol-gel process with four kinds of organic solvents-isopropyl alcohol ,ethylene glycol ,ethylene glycol mono-methyl ether and ethylene glycol ether .The transmittance of sol-gel with different solvents and the structure and morphology of BTS films were characterized by means of spectrophotometer ,XRD and SEM .The sol-gel transition speed and the thin-film crystalline quality were analyzed .The results show that after ethylene glycol ether is laid for one to three days ,the quality of BST thin films is bet-ter .The choice of solvent with little viscosity ,high boiling point and large heat-evaporated capacity is beneficial to the formation of thin films with high compactness in the sol-gel process .