粉末冶金材料科学与工程
粉末冶金材料科學與工程
분말야금재료과학여공정
POWDER METALLURGY MATERIALS SCIENCE AND ENGINEERING
2014年
1期
77-82
,共6页
ZrMoN复合膜%显微结构%力学性能%摩擦性能
ZrMoN複閤膜%顯微結構%力學性能%摩抆性能
ZrMoN복합막%현미결구%역학성능%마찰성능
ZrMoN composite films%microstructure%mechanical properties%tribological properties
采用磁控溅射法在单晶硅(100)和304不锈钢基底上沉积不同Mo含量的Zr1-xMoxN(x=0.05，0.14，0.42，0.52)复合膜，采用X射线衍射仪、纳米压痕仪(CSM)、摩擦磨损试验机、扫描电镜和能谱仪研究复合膜的显微结构、力学性能及摩擦性能。结果表明：Zr1-xMoxN复合膜以fcc (Zr，Mo)N结构为主，随x增大，薄膜中会出现fcc Mo2N相。复合膜的硬度从28.1 GPa(ZrN)增加至29.6 GPa(x=0.05)，x继续增加，硬度逐渐降低。室温下，薄膜的摩擦因数由0.69(ZrN)降低至0.44(x=0.14)，x继续增加摩擦因数略有增加。当温度高于100℃时，Zr0.58Mo0.42N复合膜的摩擦因数随温度升高先升高后降低，在300℃时达到最大。并讨论了ZrMoN复合膜Magnéli相的作用和自适应机制。
採用磁控濺射法在單晶硅(100)和304不鏽鋼基底上沉積不同Mo含量的Zr1-xMoxN(x=0.05，0.14，0.42，0.52)複閤膜，採用X射線衍射儀、納米壓痕儀(CSM)、摩抆磨損試驗機、掃描電鏡和能譜儀研究複閤膜的顯微結構、力學性能及摩抆性能。結果錶明：Zr1-xMoxN複閤膜以fcc (Zr，Mo)N結構為主，隨x增大，薄膜中會齣現fcc Mo2N相。複閤膜的硬度從28.1 GPa(ZrN)增加至29.6 GPa(x=0.05)，x繼續增加，硬度逐漸降低。室溫下，薄膜的摩抆因數由0.69(ZrN)降低至0.44(x=0.14)，x繼續增加摩抆因數略有增加。噹溫度高于100℃時，Zr0.58Mo0.42N複閤膜的摩抆因數隨溫度升高先升高後降低，在300℃時達到最大。併討論瞭ZrMoN複閤膜Magnéli相的作用和自適應機製。
채용자공천사법재단정규(100)화304불수강기저상침적불동Mo함량적Zr1-xMoxN(x=0.05，0.14，0.42，0.52)복합막，채용X사선연사의、납미압흔의(CSM)、마찰마손시험궤、소묘전경화능보의연구복합막적현미결구、역학성능급마찰성능。결과표명：Zr1-xMoxN복합막이fcc (Zr，Mo)N결구위주，수x증대，박막중회출현fcc Mo2N상。복합막적경도종28.1 GPa(ZrN)증가지29.6 GPa(x=0.05)，x계속증가，경도축점강저。실온하，박막적마찰인수유0.69(ZrN)강저지0.44(x=0.14)，x계속증가마찰인수략유증가。당온도고우100℃시，Zr0.58Mo0.42N복합막적마찰인수수온도승고선승고후강저，재300℃시체도최대。병토론료ZrMoN복합막Magnéli상적작용화자괄응궤제。
Zr1-xMoxN (x=0.05, 0.14, 0.42, 0.52) composite films with different Mo content were deposited on wafers of silicon (100) and 304 stainless steel by magnetron sputtering technique. The microstructures, mechanical properties and friction properties of Zr1-xMo0.42N films were investigated by X-ray diffraction, nano-indentation CSM, high-temperature ball-on-disc tribo-meter and SEM-EDS analysis. The results show that Zr1-xMoxN composite films mainly exhibit fcc (Zr, Mo)N structure, fcc Mo2N phase appears in the film with the increase of x. The hardness of the film increases from 28.1 GPa (ZrN) to 29.6 GPa (x=0.05), the hardness gradually decreases with x continues to increase. At room temperature, friction coefficient of ZrMoN composite films reduces from 0.69 (ZrN) to 0.44 (x=0.14), with x continues to increase, the friction coefficient increases slightly. The friction coefficient of Zr0.58Mo0.42N composites film increases and then decreases with the increase of temperature when the temperature is over 100 ℃ , the friction coefficient reaches a maximum value at 300 ℃,with the temperature continues to increase the friction coefficient decreases gradually. The effect and self-adaptive mechanisms of Magnéli phase in the ZrMoN films are also discussed.
