CAJ | 학술논문

氧化镓材料的电导在高温（400℃以上）下随环境气氛显著变化的电学性质可用于汽车尾气成分的检测。相比于薄膜材料，氧化镓纳米线阵列具有更大的比表面，增加了与待测气体接触面积，有可能大幅提高探测器的灵敏度。本文直接利用生长在衬底上的图形化氧化镓纳米线阵列制成气体探测元件，初步分析了纳米线未掺杂和掺杂条件下其对还原性气体的浓度变化的响应，探讨了反应过程的机理，为后续研究打下了基础。
양화가재료적전도재고온（400℃이상）하수배경기분현저변화적전학성질가용우기차미기성분적검측。상비우박막재료，양화가납미선진렬구유경대적비표면，증가료여대측기체접촉면적，유가능대폭제고탐측기적령민도。본문직접이용생장재츤저상적도형화양화가납미선진렬제성기체탐측원건，초보분석료납미선미참잡화참잡조건하기대환원성기체적농도변화적향응，탐토료반응과정적궤리，위후속연구타하료기출。
The conductance of the gallium oxide that change in different ambient atmosphere at high temperature ( above 400 ℃) makes it a promising material as high temperature gas sensor. Compared to gallium oxide film, gallium oxide nanowire arrays has huge surface-volume ratio for better contact with target gases. We fabricated gas sensors using doped and undoped gallium oxide nanowire patterns that were grown on substrate. Their response to reducing gases was tested and their sensor mechanism was studied.