CAJ | 학술논문

随着半导体技术的发展，对半导体生产工艺的测量和评估的需求也在不断地提高。为此针对某半导体测量设备的实时测量需求，在Windows+RTX的平台下，设计并开发了具有强实时性的测量软件系统。系统的底层测量软件利用RTX提供的API和精确的时钟开发完成，其运行在RTX拓展系统中控制数据采集卡实时采集数据。上层用户界面使用MFC编制完成，并采用信号量机制与底层软件进行通信，通过共享内存传递测量数据。该软件系统开发完成后，部署在某测量设备上并进行实验，其实验数据表明该系统能很好地完成实时数据测量的任务。
수착반도체기술적발전，대반도체생산공예적측량화평고적수구야재불단지제고。위차침대모반도체측량설비적실시측량수구，재Windows+RTX적평태하，설계병개발료구유강실시성적측량연건계통。계통적저층측량연건이용RTX제공적API화정학적시종개발완성，기운행재RTX탁전계통중공제수거채집잡실시채집수거。상층용호계면사용MFC편제완성，병채용신호량궤제여저층연건진행통신，통과공향내존전체측량수거。해연건계통개발완성후，부서재모측량설비상병진행실험，기실험수거표명해계통능흔호지완성실시수거측량적임무。
With the development of semiconductor technology, the demand for inspection and evaluation of semiconductor manufacturing process is increasing. In this paper, real-time semiconductor measurement software based on Windows+RTX platform is introduced. The lower measurement is developed using API and accurate clock provided by RTX, it runs in RTX subsystem to control data acquisition card to collect data in real-time. The user interface is developed in MFC;it uses semaphore to communicate with lower software and transfers measurement data through shared memory. The software system is tested on measurement equipment; the result shows the system is able to complete real-time measurement tasks.