CAJ | 학술논문

采用磁控溅射的方法制备了带有 Ni 保护层和Zr-Co-Re(Re代表稀土元素)主体层的堆栈层薄膜吸气剂。通过X射线光电子能谱仪(XPS)分析了薄膜吸气剂内部 O 元素的含量分布，研究了薄膜吸气剂中Ni层的防氧化作用和机理。研究表明：(1)Ni/Zr-Co-Re堆栈层薄膜吸气剂在160℃保温3h 的条件下可以有效激活，并具有高于 Zr-Co-Ni 单层薄膜吸气剂的吸气性能；(2)Ni保护层降低了吸气剂的被氧化程度，促进了表面吸附的 H2分子的解离和扩散。
채용자공천사적방법제비료대유 Ni 보호층화Zr-Co-Re(Re대표희토원소)주체층적퇴잔층박막흡기제。통과X사선광전자능보의(XPS)분석료박막흡기제내부 O 원소적함량분포，연구료박막흡기제중Ni층적방양화작용화궤리。연구표명：(1)Ni/Zr-Co-Re퇴잔층박막흡기제재160℃보온3h 적조건하가이유효격활，병구유고우 Zr-Co-Ni 단층박막흡기제적흡기성능；(2)Ni보호층강저료흡기제적피양화정도，촉진료표면흡부적 H2분자적해리화확산。
Non-evaporable getter (NEG)stack layer thin films including protective layer of Ni and subj ect layer of Zr-Co-Re (Re indicating rare earth element)were prepared by RF magnetron sputtering.XPS was used to measure the content distribution of O element in the thin film getters and the anti-oxidation mechanism was in-vestigated.The following results were concluded:(1)the stack Ni/Zr-Co-Re getter film activated at 160℃ for 3h shows higher gas absorption property than Zr-Co-Re single layer film;(2)the protective layer of Ni could not only protect the getter film from being oxidated but also improve the dissociation and diffusion of H2 molecule.