CAJ | 학술논문

以多壁碳纳米管(multi-walled carbon nanotubes,MWCNTs)和α-六噻吩(α-sexithiophene,α-6T)双层膜作为有源层,二氧化硅(SiO2)为绝缘层,钛/金(Ti/Au)作为电极,制备了沟道宽长比为640的有机薄膜晶体管(organic thin-film transistors,OT-FT)气体传感器。测试了该传感器对痕量二氧化氮(NO2)气体的实时响应特性,并分析了 NO2气体对OTFT传感器阈值电压、载流子迁移率等多参数的影响。研究结果表明,基于 MWCNTs/α-6T 的 OTFT器件有较好的电学特性,载流子迁移率为3.0×10-2 cm2/V·s；OTFT传感器对 NO2气体具有较高的响应率,响应和恢复时间短,能检测(0.2~1)×10-6的痕量NO2气体,且具有良好的重复性；同时可以利用阈值电压和载流子迁移率等多参数来表征响应结果。形貌分析结果表明双层敏感膜的特殊形貌有利于提高器件的气敏性能。
이다벽탄납미관(multi-walled carbon nanotubes,MWCNTs)화α-륙새분(α-sexithiophene,α-6T)쌍층막작위유원층,이양화규(SiO2)위절연층,태/금(Ti/Au)작위전겁,제비료구도관장비위640적유궤박막정체관(organic thin-film transistors,OT-FT)기체전감기。측시료해전감기대흔량이양화담(NO2)기체적실시향응특성,병분석료 NO2기체대OTFT전감기역치전압、재류자천이솔등다삼수적영향。연구결과표명,기우 MWCNTs/α-6T 적 OTFT기건유교호적전학특성,재류자천이솔위3.0×10-2 cm2/V·s；OTFT전감기대 NO2기체구유교고적향응솔,향응화회복시간단,능검측(0.2~1)×10-6적흔량NO2기체,차구유량호적중복성；동시가이이용역치전압화재류자천이솔등다삼수래표정향응결과。형모분석결과표명쌍층민감막적특수형모유리우제고기건적기민성능。
The multi-walled carbon nanotubes (MWCNTs)andα-sexithiophene (α-6T)bilayer were taken as the active layer,and silicon dioxide (SiO2 )was used as the insulating layer.Titanium/aurum (Ti/Au)were made as the electrode for the prepared OTFT gas sensor,of which the ratio of channel width to length was 640.The real-time response characteristics of the sensor exposed to nitrogen dioxide (NO2 )were tested,and the effect of NO2 on the multi-parameters of the OTFT sensor,such as threshold voltage and carrier mobility,was ana-lyzed.The results showed that,the OTFT device based on MWCNTs/α-6T bilayer performed better electrical properties,and the carrier mobility reached 3.0×10-2 cm2/V·s.The OTFT gas sensor showed the high re-sponse when exposed to NO2 ,and the time of response and recovery were short.The trace (0.2-1)×10-6 NO2 were detected and the sensor also had the good repeatability.It was feasible to take the multi-parameters to present the gas response results.Morphology analysis showed that the special feature of the bilayer was helpful for improving the gas sensitivity.