CAJ | 학술논문

为探讨微机电系统中平板结构弛豫动力学特性,基于Euler-Bernoulli方程,计入空气滑膜阻尼与压膜阻尼对微板弛豫过程的影响,导出两端绞紧微板挠度弛豫表达式,并给出临界阻尼、过阻尼及欠阻尼时微板弛豫Ma-ple算例。利用ANSYS对微板临界阻尼、过阻尼以及欠阻尼弛豫进行仿真,结果显示不同长宽比微板仿真数据均与理论计算符合较好。
위탐토미궤전계통중평판결구이예동역학특성,기우Euler-Bernoulli방정,계입공기활막조니여압막조니대미판이예과정적영향,도출량단교긴미판뇨도이예표체식,병급출림계조니、과조니급흠조니시미판이예Ma-ple산례。이용ANSYS대미판림계조니、과조니이급흠조니이예진행방진,결과현시불동장관비미판방진수거균여이론계산부합교호。
In order to explore micro-plate relaxation dynamics characteristic,the deflection relaxation expression of micro-plate with two hinged ends was educed based on Euler-Bernoulli equation considering air slide-film and squeeze-film damping effect.Numerical examples of micro-plate deflection relaxation process under critical-damping,over-damping and under-damping were calculated by Maple.Micro-plate relaxation process under critical-damping,over-damping and under-damping were simulated by ANSYS.Simulation result indicates that simulation data of micro-plates with different length-width ratio conform to theoretical calculation.