CAJ | 학술논문

为了掌握硅压阻、数字式振筒和硅电容3种气压传感器的静态性能，进行了2次静态性能测试(非线性、迟滞、重复性)、温度测试和长期稳定性试验，并对相应各项性能进行了评估和比较。结果表明，硅电容式传感器静态特性和温度稳定性均优于其他2种；振筒式静态特性在不同环境温度下均表现良好且较稳定；常温下，硅压阻传感器表现良好，性能与振筒式接近，但低温条件下，性能下降明显，温度系数达0.0021 hPa/℃。3种传感器长期稳定性比较结果说明了引入年漂移量作为周期检定的必检项目的必要性，测试结果也证明硅电容式气压传感器已达到了气象观测业务使用要求。
위료장악규압조、수자식진통화규전용3충기압전감기적정태성능，진행료2차정태성능측시(비선성、지체、중복성)、온도측시화장기은정성시험，병대상응각항성능진행료평고화비교。결과표명，규전용식전감기정태특성화온도은정성균우우기타2충；진통식정태특성재불동배경온도하균표현량호차교은정；상온하，규압조전감기표현량호，성능여진통식접근，단저온조건하，성능하강명현，온도계수체0.0021 hPa/℃。3충전감기장기은정성비교결과설명료인입년표이량작위주기검정적필검항목적필요성，측시결과야증명규전용식기압전감기이체도료기상관측업무사용요구。
Experiments on static,temperature and long-term stability were performed to study the static performance of the silicon piezoresistance barometric sensor,digital vibrating cylinder and silicon capaci-tance barometric sensor.These barometric sensors for various performance were also evaluated and com-pared.According to the data.It indicates that the static performance and temperature stability of silicon capacitive sensor are both better than the other two;that vibration cylinder maintains good and stable stat-ic performance at different environmental temperature;that under normal temperature,the piezoresistive sensor has good performance close to the vibration cylinder,but the performance decreases significantly at low temperature,and that the temperature coefficient reaches 0.0021 hPa/℃.It proves the necessity of introducing the year drift quantity as integrant check project in cycle test.The experiment result also indi-cates that the silicon capacitive pressure sensor has met the requirement of meteorological observation bus-iness application.