电子工业专用设备
電子工業專用設備
전자공업전용설비
EQUIPMENT FOR ELECTRONIC PRODUCTS MANUFACTURING
2012年
9期
31-34,50
,共5页
预浓缩气相色谱质谱%挥发性有机化合物%洁净室%化学过滤器
預濃縮氣相色譜質譜%揮髮性有機化閤物%潔淨室%化學過濾器
예농축기상색보질보%휘발성유궤화합물%길정실%화학과려기
Preconcentrator-GC-MS(Preconcentrator-Gas Chromatography-Mass Spectrometer)%VOC(Volatile Organic Compound)%Clean room%Chemical filter
对预浓缩气相色谱质谱在半导体洁净室VOC（Volatile Organic compound,挥发性有机化合物）管控中的应用进行了系统的归纳和总结。主要从三个方面的应用进行了讨论：一是洁净室VOC来源确认,二是确认厂务系统处理效率的应用,三是厂务系统处理最终效果的确认。也是实验室分析仪器在半导体行业应用方面的成功范例。
對預濃縮氣相色譜質譜在半導體潔淨室VOC（Volatile Organic compound,揮髮性有機化閤物）管控中的應用進行瞭繫統的歸納和總結。主要從三箇方麵的應用進行瞭討論：一是潔淨室VOC來源確認,二是確認廠務繫統處理效率的應用,三是廠務繫統處理最終效果的確認。也是實驗室分析儀器在半導體行業應用方麵的成功範例。
대예농축기상색보질보재반도체길정실VOC（Volatile Organic compound,휘발성유궤화합물）관공중적응용진행료계통적귀납화총결。주요종삼개방면적응용진행료토론：일시길정실VOC래원학인,이시학인엄무계통처리효솔적응용,삼시엄무계통처리최종효과적학인。야시실험실분석의기재반도체행업응용방면적성공범례。
Preconcentrator-GC-MS was used in semiconductor clean room VOC control.Three applications were discussed in this research.The first application was clean room VOC source confirmation,the second application was chemical filter system efficiency test,and the third was the final effect confirmation after chemical filter system installation.This research is a successful example of lab analysis tool application in the semiconductor field.
