洁净与空调技术
潔淨與空調技術
길정여공조기술
CONTAMINATION CONTROL & AIR-CONDITIONING TECHNOLOGY
2012年
1期
9-13
,共5页
TFT%LCD%Clean%Room%Airflow%Improvement%Yield%Improvement%Particle
TFT%LCD%Clean%Room%Airflow%Improvement%Yield%Improvement%Particle
TFT%LCD%Clean%Room%Airflow%Improvement%Yield%Improvement%Particle
TFT LCD%Clean Room%Aperture rate%Airflow Improvement%Yield Improvement%Particle
在传统的洁净间气流管理管控的基础上,着重介绍了TFT LCD制造业用洁净室系统的特性,以及在TFT LCD制造行业普遍出现的重要异常气流问题,提供了针对性的有效气流改善实施方案,并确认了气流改善,产品良率改善的效果,提出了未来TFT LCD洁净间气流改善的主要发展方向。
在傳統的潔淨間氣流管理管控的基礎上,著重介紹瞭TFT LCD製造業用潔淨室繫統的特性,以及在TFT LCD製造行業普遍齣現的重要異常氣流問題,提供瞭針對性的有效氣流改善實施方案,併確認瞭氣流改善,產品良率改善的效果,提齣瞭未來TFT LCD潔淨間氣流改善的主要髮展方嚮。
재전통적길정간기류관리관공적기출상,착중개소료TFT LCD제조업용길정실계통적특성,이급재TFT LCD제조행업보편출현적중요이상기류문제,제공료침대성적유효기류개선실시방안,병학인료기류개선,산품량솔개선적효과,제출료미래TFT LCD길정간기류개선적주요발전방향。
Based on the general clean room management,the paper studies the characteristic of TFT LCD manufacturing clean room system and the currently main problem of the abnormal airflow.For abnormal airflow,the reason and the effective improvement methods were analyzed and introduced by this paper.Moreover,the airflow and yield result of the improvement were confirmed.At the last TFT LCD clean room airflow improvement development direction in the future was mainly expected.
