CAJ | 학술논문

芯片厂的建设对厂房洁净室的要求很高。武汉新芯集成电路厂是目前国内已经投产的芯片厂中生产工艺最先进的，其洁净室面积也是国内同类厂房中洁净面积最大的厂房，本文结合武汉新芯集成电路厂的建设实例，介绍了高洁净度洁净室设计与施工的一般方法。
심편엄적건설대엄방길정실적요구흔고。무한신심집성전로엄시목전국내이경투산적심편엄중생산공예최선진적，기길정실면적야시국내동류엄방중길정면적최대적엄방，본문결합무한신심집성전로엄적건설실례，개소료고길정도길정실설계여시공적일반방법。
The chipset plant usual demands higher advanced production lines and the largest clean rooms Wuhan Xinxin chipset plant as an example, the paper clean rooms of high cleanliness. cleanliness rooms. Wuhan Xinxin chipset plant owns the most among the similar plants in China. Taking the clean rooms in introduces the common method of designing and constructing