CAJ | 학술논문

针对光刻线宽均匀性控制问题,研究了硅片翘曲度对光刻线宽均匀性的影响。采用翘曲度测试仪研究热工艺过程中硅片翘曲度的变化。研究结果表明,硅片翘曲度对线宽均匀性产生重要的影响,翘曲度大,则线宽均匀性降低。通过优化栅氧化工艺的升降温速率、进出炉速率,使硅片翘曲度降低,线宽非均匀性由±4%降低到±2%。
침대광각선관균균성공제문제,연구료규편교곡도대광각선관균균성적영향。채용교곡도측시의연구열공예과정중규편교곡도적변화。연구결과표명,규편교곡도대선관균균성산생중요적영향,교곡도대,칙선관균균성강저。통과우화책양화공예적승강온속솔、진출로속솔,사규편교곡도강저,선관비균균성유±4%강저도±2%。
Unpowered vessel mooring, when resisting current and wave）, will generate loads that lead to strong interference forces in disaster weather （wind, dragging anchor. In order to study the loads, separated modeling method is applied. Through the force analysis under every working condition, matlab is used to conduct simulation calculation. The result is： when the wind force is over 8 m/s, A/L over 0.7 or combined action （wind, current and wave） over 3.7×10^4 kg, the shilJ should be evacuated. This result can be taken as a reference by disaster-relief staff, administrators concerned and crew.