CAJ | 학술논문

介绍了一维Al掺杂的ZnO（Al-ZnO）纳米结构材料的制备，研究了该材料体系的电极设计与优化。结果表明，适合于这种材料的电极为Au／Ni双层金属膜，经过在Ar和N2气氛中分别退火处理后，Au／Ni双层金属膜与Al-ZnO纳米结构材料的接触电阻得到明显降低，并且在Ar气氛中退火要好于在N2气氛中退火。
개소료일유Al참잡적ZnO（Al-ZnO）납미결구재료적제비，연구료해재료체계적전겁설계여우화。결과표명，괄합우저충재료적전겁위Au／Ni쌍층금속막，경과재Ar화N2기분중분별퇴화처리후，Au／Ni쌍층금속막여Al-ZnO납미결구재료적접촉전조득도명현강저，병차재Ar기분중퇴화요호우재N2기분중퇴화。
Fabrication of Al-doped ZnO nanostructure（Al-ZnO） is reported, and the electrode design of Al-ZnO nanostructures is also investigated. The results indicated that Au/Ni film is suitable for the electrode of Al-ZnO nanostructure. After annealing in Ar and N2, resistance between Au/Ni film and A1-ZnO nanostructures obviously decreased, while the resistance value after annealing in Ar is less than that in N2.