CAJ | 학술논문

研究了用迈克尔逊干涉条纹图像对比法测量微位移的实验.用He-Ne激光器、反射镜和分束镜组成干涉光路,一个反射镜固定在被测目标靶上,目标靶带动其中一个反射镜移动,使干涉光路发生变化,从而导致干涉条纹改变.利用线阵CCD采集干涉条纹图像并用对比法处理和计算,获得目标物的微位移.实验结果表明,用图像对比法处理干涉条纹,计算方法可行且准确率高,测量的精准度可以达到微米级.
연구료용매극이손간섭조문도상대비법측량미위이적실험.용He-Ne격광기、반사경화분속경조성간섭광로,일개반사경고정재피측목표파상,목표파대동기중일개반사경이동,사간섭광로발생변화,종이도치간섭조문개변.이용선진CCD채집간섭조문도상병용대비법처리화계산,획득목표물적미위이.실험결과표명,용도상대비법처리간섭조문,계산방법가행차준학솔고,측량적정준도가이체도미미급.
The micro-displacement measurement experiment based on the comparison of Michelson interference fringe images is studied.The beam path of optical interference is composed with He-Ne laser,mirrors and beam splitter.The measured target is fixed with reflector.The target drives one of the mirrors that causing the change of interference optical path,thereby the interference fringes are led to change.The interference fringe images are collected by linear array CCD,which are analyzed and calculated by comparison method to achieving the micro displacement of target.Experiential results show that using image antitheses method to dispose interference fringes is feasible and has high accuracy of 1 micron level.