CAJ | 학술논문

因LED测试芯片经过切割、崩裂、扩张后其上的晶粒会产生很大变形,产生很多空点和排列不规则的点。LED探针台使用面阵相机对晶圆上的晶粒图像数据采集时,两屏之间存在重叠区域,造成大量重复数据。要短时间内获取到点附于蓝膜上晶粒的精确唯一位置和坐标,需要寻找一种可靠高效的数据处理算法,通过对几种数据处理算法进行研究得出最优算法。
인LED측시심편경과절할、붕렬、확장후기상적정립회산생흔대변형,산생흔다공점화배렬불규칙적점。LED탐침태사용면진상궤대정원상적정립도상수거채집시,량병지간존재중첩구역,조성대량중복수거。요단시간내획취도점부우람막상정립적정학유일위치화좌표,수요심조일충가고고효적수거처리산법,통과대궤충수거처리산법진행연구득출최우산법。
LED test chip in the blue film, after cutting, crack, expansion, the grains on the test chip produce many empty and irregular points. LED probe employ the plane array camera to collect the image data of die, there is an overlap region between two screen, resulting in a large number of duplicate data. To obtain a precise location data and coordinate data of the blue film grain in a short period of time, you need to find a reliable and efficient data processing algorithms. This paper studies the optimal algorithm on several data processing algorithms.