化学品供给、回收系统配管--FA管道安装工艺简述
화학품공급、회수계통배관--FA관도안장공예간술
Chemical Supply and Receive System Piping Installation Introduction to Pfa Piping Technology
  • 万方数据
    洁净与空调技术 길정여공조기술
    CONTAMINATION CONTROL & AIR-CONDITIONING TECHNOLOGY
    2012年 3期 99-101 ,共3页

    李国钰%杜丽军

    리국옥%두려군

    半导体%化学品%供给%回收系统%PFA%洁净%管道 半導體%化學品%供給%迴收繫統%PFA%潔淨%管道
    반도체%화학품%공급%회수계통%PFA%길정%관도
    Semiconductor%Chemicals supply and recovery system%PFA%Clean%Pipes
    介绍了在芯片工厂中，应用于化学品供给、回收系统的PFA管道安装工艺。
    개소료재심편공엄중，응용우화학품공급、회수계통적PFA관도안장공예。
    This article describes the PFA pipe installation technology for chemical supply and recovery systems in wafer processing plants.
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