CAJ | 학술논문

结合MEMS工艺研制了一种可用于红外气体传感器的低成本电调制MEMS辐射光源。辐射源主要由Si3N4/SiO2的复合支撑薄膜和铂金发热电极组成。在2～15μm的红外辐射波段，有足够强的辐射强度，可产生相当于黑体300～850K的红外辐射，其辐射效率达到10.9％；辐射源的动态调制频率可达到100Hz，响应时间12.8ms，足以满足红外气体测量对所需红外光源性能的要求。通过将微辐射源用于实际的NDIR气体传感器中，证明辐射源具有稳定的辐射功率，可以完成20ppmCO2和50ppm SO2的探测，并具有8s左右的响应时间。
결합MEMS공예연제료일충가용우홍외기체전감기적저성본전조제MEMS복사광원。복사원주요유Si3N4/SiO2적복합지탱박막화박금발열전겁조성。재2～15μm적홍외복사파단，유족구강적복사강도，가산생상당우흑체300～850K적홍외복사，기복사효솔체도10.9％；복사원적동태조제빈솔가체도100Hz，향응시간12.8ms，족이만족홍외기체측량대소수홍외광원성능적요구。통과장미복사원용우실제적NDIR기체전감기중，증명복사원구유은정적복사공솔，가이완성20ppmCO2화50ppm SO2적탐측，병구유8s좌우적향응시간。
A micro thermal emitter based on electrically heated thin film has been studied for non-dispersive infrared gas sensor as a infrared source The IR source, with effectively emitting area of 2.0*2.0 mm2, is obtained from heated platinum thin film resistors that deposit on a Si3N4/SiO2 suspended membrane. IR radiation power of the emitter is up to 60mW and the energy efficiency ratio reaches 10.9%with the effective blackbody temperature ranged from 300 to 850K. Moreover, it shows very good dynamic parameters with a modulation frequency as high as 100Hz and response time 18.3ms, which make it suitable for fast NDIR measurements of concentration. It has been proven that the emitter can sever as a stable IR source in Non-dispersive infrared (NDIR) gas sensor. The NDIR used the microemitter has acceptable sensitivity and rapid response time with detection limits of 20ppm and 50ppm level for CO2 and SO2 respectively.