CAJ | 학술논문

机械耦合效应严重制约了一体差动式振梁加速度的精度提高。为了降低机械耦合效应，提高加速度测量精度，设计了一种新型一体差动式石英振梁加速度计敏感头。首先，介绍了机械耦合效应所引起的“锁频”问题，建立了机械耦合效应数学建模。其次，依据机械耦合数学模型，对加速度计敏感结构进行优化。最后，通过有限元方法进行仿真，验证了理论设计的合理性。实验证明：新型一体差动式石英振梁加速度计具有低机械耦合效应、高灵敏度、小型化等优点。
궤계우합효응엄중제약료일체차동식진량가속도적정도제고。위료강저궤계우합효응，제고가속도측량정도，설계료일충신형일체차동식석영진량가속도계민감두。수선，개소료궤계우합효응소인기적“쇄빈”문제，건립료궤계우합효응수학건모。기차，의거궤계우합수학모형，대가속도계민감결구진행우화。최후，통과유한원방법진행방진，험증료이론설계적합이성。실험증명：신형일체차동식석영진량가속도계구유저궤계우합효응、고령민도、소형화등우점。
The specific problem “lock- in”, due to the mechanical coupling between the two beams in the monolithic differential vibrating beam accelerometer (VBA), degrades the VBA accuracy seriously. To solve this problem, it was new monolithic differential quartz vibrating beam accelerometer that was designed. Firstly, the “lock- in” problem resulting from the mechanical coupling was introduced and the mathematical model of mechanical coupling was established. Secondly, the structure based on the math model was optimized. And at last, the theoretical design was testified with finite element analysis.