CAJ | 학술논문

根据CCD探测器的结构特点和传热学理论，建立了1.06μm激光辐照CCD探测器的理论模型，利用有限元法对1.06μm激光辐照CCD探测器中的温度和应力分布进行了数值分析，讨论了CCD探测器的激光损伤机理，并比较了不同重频激光的损伤效果。计算结果表明，遮光铝膜与SiO2层的分离和硅材料的应力、熔融损伤会导致CCD器件损伤；平均功率密度一定的条件下，高重频激光比连续激光更容易造成CCD探测器的损伤，且重频越低，损伤越容易发生。
근거CCD탐측기적결구특점화전열학이론，건립료1.06μm격광복조CCD탐측기적이론모형，이용유한원법대1.06μm격광복조CCD탐측기중적온도화응력분포진행료수치분석，토론료CCD탐측기적격광손상궤리，병비교료불동중빈격광적손상효과。계산결과표명，차광려막여SiO2층적분리화규재료적응력、용융손상회도치CCD기건손상；평균공솔밀도일정적조건하，고중빈격광비련속격광경용역조성CCD탐측기적손상，차중빈월저，손상월용역발생。
According to the structure of CCD detector and the theory of thermal conduction, the theoretical model of CCD detector irradiated by 1.06μm laser is developed and a numerical simulation was performed to calculate temperature and stress distribution in CCD detector irradiated by 1.06 μm laser using finite element method. The thermal and mechanical damage in CCD detector induced by 1.06μm laser is investigated. Besides, the causes of CCD detector’s impairment and damage effects of laser working in different state were discussed. Al film’s separation from SiO2, thermal-stress and fusion impairment of Si could lead to damage of CCD detector. With the average power density unchanged, CCD detector was more vulnerable to laser of high pulse repetitive frequency (PRF) than to CW-laser. And the lower the PRF was, the more easily the injury might occur.