闽江学院学报
閩江學院學報
민강학원학보
JOURNAL OF MINJIANG UNIVERSITY
2012年
2期
49-52
,共4页
多孔%微腔%SiGe%Si
多孔%微腔%SiGe%Si
다공%미강%SiGe%Si
: porous%microcavity%SiGe%Si
提出了采用多孔SiGe／Si异质多层结构来获得布拉格反射镜方法．首先采用传输矩阵方法设计了多孔SiGe／Si异质材料微腔结构，并通过超高真空化学气相沉积与电化学阳极腐蚀相结合的方法实验制备了两种结构的微腔，同时对微腔进行光学性质表征，并详细讨论了实验结果．
提齣瞭採用多孔SiGe／Si異質多層結構來穫得佈拉格反射鏡方法．首先採用傳輸矩陣方法設計瞭多孔SiGe／Si異質材料微腔結構，併通過超高真空化學氣相沉積與電化學暘極腐蝕相結閤的方法實驗製備瞭兩種結構的微腔，同時對微腔進行光學性質錶徵，併詳細討論瞭實驗結果．
제출료채용다공SiGe／Si이질다층결구래획득포랍격반사경방법．수선채용전수구진방법설계료다공SiGe／Si이질재료미강결구，병통과초고진공화학기상침적여전화학양겁부식상결합적방법실험제비료량충결구적미강，동시대미강진행광학성질표정，병상세토론료실험결과．
We propose a method for preparing the Bragg reflectors by porous SiC, e/Si heterogeneous multi- layer structure. Two kinds of structure of porous SiGe/Si microeavity are prepared through a method by combining ultra-high vacuum chemical vapor deposition and electrochemical anode, based on the numerical simulations of transfer matrix method. The optical properties of the microeavity are characterized, and the experimental results are discussed in detail.
