CAJ | 학술논문

铝诱导层交换是指铝-非晶硅双层膜经低温退火后，铝和非晶硅层的位置发生交换，导致在原来铝层的位置处形成一完整连续的多晶硅层．这一技术的应用将大幅度降低制备多晶硅薄膜的成本．本文针对近几年有关铝诱导层交换的研究进展，包括实验和理论研究两方面的进展，结合铝诱导层交换表征的一具体实例，对影响铝诱导交换的主要因素、层交换的动态过程及其机理作了一个综述．
려유도층교환시지려-비정규쌍층막경저온퇴화후，려화비정규층적위치발생교환，도치재원래려층적위치처형성일완정련속적다정규층．저일기술적응용장대폭도강저제비다정규박막적성본．본문침대근궤년유관려유도층교환적연구진전，포괄실험화이론연구량방면적진전，결합려유도층교환표정적일구체실례，대영향려유도교환적주요인소、층교환적동태과정급기궤리작료일개종술．
The aluminum-induced layer exchange (ALILE) means that the exchange of the location of aluminum layer and amorphous silicon layer upon low-temperature annealing of aluminum-amorphous silicon bilayer. Upon layer exchange, a continuous complete polycrystalline silicon layer is formed at the original location of the aluminum layer. The application of this technique will reduce largely the cost for producing polycrystalline silicon films. In this paper, the progresses in both experimental and theoretical aspects on the study of ALILE are reviewed, focusing on the main effects, kinetics and mechanism of ALILE process.