中国有色金属学报（英文版）
中國有色金屬學報（英文版）
중국유색금속학보（영문판）
TRANSACTIONS OF NONFERROUS METALS SOCIETY OF CHINA
2014年
9期
2864-2869
,共6页
陈娥%彭坤%杨武霖%朱家俊%李德意%周灵平
陳娥%彭坤%楊武霖%硃傢俊%李德意%週靈平
진아%팽곤%양무림%주가준%리덕의%주령평
NdFeB%铝薄膜%磁控溅射%耐蚀性能%膜厚
NdFeB%鋁薄膜%磁控濺射%耐蝕性能%膜厚
NdFeB%려박막%자공천사%내식성능%막후
NdFeB%aluminum coatings%magnetron sputtering%corrosion resistance%coating thickness
采用直流磁控溅射的方法在烧结NdFeB磁体表面沉积Al薄膜提高磁体的耐蚀性能。研究膜厚及溅射功率对薄膜结构和耐蚀性能的影响。利用SEM对Al薄膜的微观结构进行分析，并采用动态极化曲线和中性盐雾实验分析Al薄膜耐蚀性能。均匀致密的Al薄膜的形成是获得良好耐蚀性能的必要条件。在51~82 W 溅射功率下制备的6.69μm的Al薄膜具有良好的耐蚀性能。
採用直流磁控濺射的方法在燒結NdFeB磁體錶麵沉積Al薄膜提高磁體的耐蝕性能。研究膜厚及濺射功率對薄膜結構和耐蝕性能的影響。利用SEM對Al薄膜的微觀結構進行分析，併採用動態極化麯線和中性鹽霧實驗分析Al薄膜耐蝕性能。均勻緻密的Al薄膜的形成是穫得良好耐蝕性能的必要條件。在51~82 W 濺射功率下製備的6.69μm的Al薄膜具有良好的耐蝕性能。
채용직류자공천사적방법재소결NdFeB자체표면침적Al박막제고자체적내식성능。연구막후급천사공솔대박막결구화내식성능적영향。이용SEM대Al박막적미관결구진행분석，병채용동태겁화곡선화중성염무실험분석Al박막내식성능。균균치밀적Al박막적형성시획득량호내식성능적필요조건。재51~82 W 천사공솔하제비적6.69μm적Al박막구유량호적내식성능。
Pure Al coating was deposited on sintered NdFeB magnet by direct current (DC) magnetron sputtering to improve the corrosion resistance of magnet. The influences of coating thickness and sputtering power on microstructure and corrosion resistance of Al coating were investigated. The surface morphology of Al coating was characterized by scanning electron microscopy (SEM). The corrosion properties were investigated by potentiodynamic polarization curves and neutral salt spray (NSS) test. The formation of the uniform and compact Al coating is a necessary condition to achieve excellent corrosion resistance. And the optimal corrosion resistance can be obtained in the sample with 6.69μm thick Al coating deposited at 51-82 W.
