CAJ | 학술논문

提出了一种基于MEMS技术设计和制作应用于视网膜假体的柔性神经微电极阵列的工艺流程，引入离子束刻蚀的工艺大幅度减小了导线和线间的宽度，在单层聚合物上制作了高密度的微电极阵列（120通道，10×12阵列）。对实际制得的微电极阵列测试表明，其在1 kHz频率的电脉冲刺激下阻抗均值为16 kΩ±2 kΩ，相位差均值为-85o±3o，达到了预期设计目标。
제출료일충기우MEMS기술설계화제작응용우시망막가체적유성신경미전겁진렬적공예류정，인입리자속각식적공예대폭도감소료도선화선간적관도，재단층취합물상제작료고밀도적미전겁진렬（120통도，10×12진렬）。대실제제득적미전겁진렬측시표명，기재1 kHz빈솔적전맥충자격하조항균치위16 kΩ±2 kΩ，상위차균치위-85o±3o，체도료예기설계목표。
The paper proposed a new method to design and fabricate a flexible neural microelectrode arrays(MEA) for retinal prosthesis, the Ion-Beam technology was intruduced to decrease the width of conductive wires and the distances between wires, a high density MEA(120 microelectrodes with a matrix of 10×12) was fabricated on a single layer of polymer from this. The MEA was proved to possess a fine electrochemical property. In vitro test, the average impedance of MEA on 1 kHz was 16 kΩ±2 kΩand the average phase difference was-85o±3o.