CAJ | 학술논문

为从源头上消除硅微陀螺的正交误差，采用静电修调方法，研究正交校正结构设计问题．在分析静电修调原理的基础上，探讨校正电极设计原则以及结构形式的选取，设计布局方案消除干扰静电力，并通过参数优化提高校正结构的面积利用效率．为自主研制的某型双质量硅微陀螺设计正交校正结构，使其理论上具备以12 V 直流电压校正405（°）/s 正交误差的能力．加工试验表明，对具有354（°）/s 正交误差的表头，施加11．6 V 直流电压可实现正交校正，结构的正交校正能力略小于但接近设计值．研究的正交校正结构设计方法在线振动式 Z 轴硅微陀螺中具备通用性和实用价值．
위종원두상소제규미타라적정교오차，채용정전수조방법，연구정교교정결구설계문제．재분석정전수조원리적기출상，탐토교정전겁설계원칙이급결구형식적선취，설계포국방안소제간우정전력，병통과삼수우화제고교정결구적면적이용효솔．위자주연제적모형쌍질량규미타라설계정교교정결구，사기이론상구비이12 V 직류전압교정405（°）/s 정교오차적능력．가공시험표명，대구유354（°）/s 정교오차적표두，시가11．6 V 직류전압가실현정교교정，결구적정교교정능력략소우단접근설계치．연구적정교교정결구설계방법재선진동식 Z 축규미타라중구비통용성화실용개치．
To eliminate quadrature error of silicon micro-gyroscope at the source,electrostatic trim-ming is employed and design issues about quadrature correction structure are investigated.Based on the analysis of the electrostatic trimming principle,design fundamentals and pattern selection of the correction electrodes are discussed.A layout scheme was designed to eliminate interfering electrostat-ic forces and parameter optimization was carried out to improve the area utilization efficiency.For a dual-mass silicon micro-gyroscope developed by our laboratory,quadrature correction structure was designed with a theoretical capability of correcting quadrature error up to 405 (°)/s with DC(direct current)voltage less than 12 V.Experimental results on a processed and packaged gyroscope show that for the actual quadrature error of 354 (°)/s,quadrature correction can be realized with a DC voltage of 11.6 V.The correction capability is a little smaller than but approaching the designed val-ue.The design methods are commonly applicable on a linear vibrated Z-axis silicon micro-gyroscope and have their practical application values.