CAJ | 학술논문

采用中频磁控溅射结合离子束混合技术在不锈钢基体上制备C-SiC涂层。对制备的涂层进行能量5 keV、剂量1×1018 ions/cm2的氢离子注入,模拟涂层阻止氢渗透。之后，分别将样品从273 K加入到1173 K。采用SEM、XPS和 SIMS分析表面形貌、表面成分及各元素的深度分布。结果表明，不同温度的加热处理使涂层的成分发生变化，在723 K以下温度处理时，C-50%SiC涂层仍能保持非常好的氢阻止性能，在1023 K以上温度处理时，涂层不再具有阻氢性能。
채용중빈자공천사결합리자속혼합기술재불수강기체상제비C-SiC도층。대제비적도층진행능량5 keV、제량1×1018 ions/cm2적경리자주입,모의도층조지경삼투。지후，분별장양품종273 K가입도1173 K。채용SEM、XPS화 SIMS분석표면형모、표면성분급각원소적심도분포。결과표명，불동온도적가열처리사도층적성분발생변화，재723 K이하온도처리시，C-50%SiC도층잉능보지비상호적경조지성능，재1023 K이상온도처리시，도층불재구유조경성능。
C-SiC coatings were prepared on stainless steel substrate by the middle frequency magnetron sputtering (MFMS) and ion beam mixing technique. After deposition, these samples were implanted by 5 keV hydrogen ion beam at a dose of 1×1018 ion/cm2. Some samples were heat treated at different temperatures from 273 K to 1173 K separately. The surface morphology, surface concentration of the elements of the C-SiC coatings and element iron from substrate as well as their depth profiles were checked with SEM, XPS and SIMS analyses. The results show that the composition of the coatings is changed due to heat treatment at different temperatures. The C-50%SiC coating with an excellent hydrogen resistant property can act as hydrogen barrier at the temperature below 723 K. But the hydrogen resistant property of the coating becomes bad when it is used at the temperature of 1023 K.