CAJ | 학술논문

锗单晶衍射光学元件具有特有的色散和温度特性，在红外光学领域，具有广阔的应用前景。衍射元件必须同时满足光学镜面及相位转变点的要求，采用微圆弧金刚石单点车削是解决这一途径的主要方法之一，但采用微圆弧刀具加工时，要求同时满足粗糙度和相位突变点是加工衍射元件的难点，因此，研究微圆弧金刚石刀具车削锗单晶衍射元件具有重大意义。基于DEFORM 3D切削仿真软件，对金刚石刀具车削锗单晶材料进行了仿真分析，分析了切削参数、刀具参数对锗单晶材料粗糙度的影响，并依据仿真试验结果优选切削参数以及刀具参数进行试验，R0.1mm微圆弧刀具车削单晶材料粗糙度达到4 nm。
타단정연사광학원건구유특유적색산화온도특성，재홍외광학영역，구유엄활적응용전경。연사원건필수동시만족광학경면급상위전변점적요구，채용미원호금강석단점차삭시해결저일도경적주요방법지일，단채용미원호도구가공시，요구동시만족조조도화상위돌변점시가공연사원건적난점，인차，연구미원호금강석도구차삭타단정연사원건구유중대의의。기우DEFORM 3D절삭방진연건，대금강석도구차삭타단정재료진행료방진분석，분석료절삭삼수、도구삼수대타단정재료조조도적영향，병의거방진시험결과우선절삭삼수이급도구삼수진행시험，R0.1mm미원호도구차삭단정재료조조도체도4 nm。
Single crystal germanium material diffractive optical element (DOE), which possesses unique negative chromatic dispersion and thermal expansion coefficient, has been widely used in the IR optical field. DOE requires optical surface and transition of phase profile well. Micro-circle single point diamond turning is one of the ways to solve it. Actually it’s difficult to have the proper cutting tool parameters to fit the surface roughness and the transition of phase profile. So there is great sense to study the micro-circle single point diamond turning of DOE. This paper studied the roughness of single crystal Germanium materials affections on the turning parameters and the tool parameters by using the DEFORM 3D software. Then the test was done according to the optimization results of the simulation. The results show that the surface roughness is 4 nm when the micro-circle radius of single point diamond turning is 0.1 mm.