CAJ | 학술논문

微位移测量技术可以实现微距环境下的位置感知与位移操作,其关键在于对位移的精密测量及实时传输。本研究基于平面双叉指电容和ZIGBEE技术设计了一种无线位移传感器系统,该系统由四部分组成：位移-电容转换模块,电容采集、发送节点,电容接收节点,基于VC++开发的实时监控及结果显示软件。此外,下位机是基于ZIGBEE无线通信协议开发的。通过实验证明：系统具备6 mm的测量范围,10 um的分辨率,通信距离50 m。
미위이측량기술가이실현미거배경하적위치감지여위이조작,기관건재우대위이적정밀측량급실시전수。본연구기우평면쌍차지전용화ZIGBEE기술설계료일충무선위이전감기계통,해계통유사부분조성：위이-전용전환모괴,전용채집、발송절점,전용접수절점,기우VC++개발적실시감공급결과현시연건。차외,하위궤시기우ZIGBEE무선통신협의개발적。통과실험증명：계통구비6 mm적측량범위,10 um적분변솔,통신거리50 m。
Micro-displacement measurement is used to realize micro-scaled position sensing and operation.The key point of the technology is to monitor the distance precisely and opportunely. The wireless displace-ment sensor system based on dual interdigitated capacitance and ZIGBEE is designed in this study. The system consists of four parts ( displacement - capacitance converter module, capacitance collection and transmission node, capacitance receiver node,monitoring and displaying software based on VC++). Be-sides, the software of lower machine is developed based on the ZIGBEE wireless communication protocols. It is proved from the experiment that the system could get the measurement range of 6mm, the resolution of 10um, and the communication distance of 50m.