CAJ | 학술논문

针对大量程纳米级精度测量难的问题，结合时栅传感器的基本原理，提出一种基于交变电场耦合的纳米时栅传感器。利用Nutt内插法对影响时栅精度的关键因素-时间量进行精密测量，降低了系统对插补脉冲频率的要求，提高了测量分辨率。采用SOPC技术设计纳米时栅信号处理系统，保证了系统高性能实时测量。实验结果表明，该系统能稳定正常工作，在行程200 mm测量范围内，纳米时栅误差峰峰值为590 nm。
침대대량정납미급정도측량난적문제，결합시책전감기적기본원리，제출일충기우교변전장우합적납미시책전감기。이용Nutt내삽법대영향시책정도적관건인소-시간량진행정밀측량，강저료계통대삽보맥충빈솔적요구，제고료측량분변솔。채용SOPC기술설계납미시책신호처리계통，보증료계통고성능실시측량。실험결과표명，해계통능은정정상공작，재행정200 mm측량범위내，납미시책오차봉봉치위590 nm。
Aiming at the difficulty of the large range nano-precision measurement,this paper proposed the nanometer time grating sensor based on an alternating electric field by referring to the principle of time grating sensor. Nutt in-terpolation method is used to promote precisely time measurement which the key factor of time grating sensor. In this way the requirement of interpolation pulse's frequency is reduced and the measuring resolution is improved. Using the SOPC technology, the nanometer time grating sensor signal-process system performs well in real-time. Experimental results show that the system can work steadily,and the measurement peak-to-peak value is only 590 nm within 200 mm measuring range.