CAJ | 학술논문

基于薄膜电路工艺制作的共面波导延迟线不仅具有体积小、重量轻、损耗低、抗干扰性强等优点，还易与其他微波电路集成，延时精度较准。但它对高精度、密集孔薄膜电路的制作提出了更高的要求。通过优化薄膜电路制作工艺流程，研制出图形精度优于±5μm，具有良好金属化通孔的X波段两位延迟线薄膜电路。测试结果显示，该X波段两位延迟线的插入损耗为-5.7 dB ~-4.6 dB，带内起伏优于±0.3 dB，中心频率点相位偏差为±5°，满足设计要求。
기우박막전로공예제작적공면파도연지선불부구유체적소、중량경、손모저、항간우성강등우점，환역여기타미파전로집성，연시정도교준。단타대고정도、밀집공박막전로적제작제출료경고적요구。통과우화박막전로제작공예류정，연제출도형정도우우±5μm，구유량호금속화통공적X파단량위연지선박막전로。측시결과현시，해X파단량위연지선적삽입손모위-5.7 dB ~-4.6 dB，대내기복우우±0.3 dB，중심빈솔점상위편차위±5°，만족설계요구。
The coplanar waveguide true-time delay line, which is fabricated by thin film hybrid circuit’ s process, has several advantages such as small volume, light weight, low insert loss, and high anti-interference. It also can integrate with other microwave circuits conveniently, and the precision of true-time delay is exactly. Certainly, the fabrication of thin film hybrid circuit with high precision pattern and denseness vias process is more difficult. Through optimize the fabrication process, an X-band 2 bits true-time delay line thin film circuits has been fabricated. The microstrip precision is better than ±5μm. As show by the test results, the insert loss of 2 bits true-time delay line is-5.7dB~-4.6dB, the in-band loss variation is less than ±0.3dB, and the phase bias at operating frequencies is ±5 degree.