CAJ | 학술논문

采用能量为100 keV的He离子辐照多晶碳化钨样品,He离子的辐照剂量为1.0×1017 ions· cm-2,辐照温度从室温变化到600℃。通过SRIM软件模拟了离子的注入深度,利用导电式原子力显微镜( CAFM)分析了多晶碳化钨样品在He离子辐照条件下微观结构的演化。结果表明,He离子辐照会导致多晶碳化钨样品形成He泡,从而使样品表面发生肿胀。
채용능량위100 keV적He리자복조다정탄화오양품,He리자적복조제량위1.0×1017 ions· cm-2,복조온도종실온변화도600℃。통과SRIM연건모의료리자적주입심도,이용도전식원자력현미경( CAFM)분석료다정탄화오양품재He리자복조조건하미관결구적연화。결과표명,He리자복조회도치다정탄화오양품형성He포,종이사양품표면발생종창。
Poly-crystalline Wolfram Carbide( WC) samples have been irradiated with 100 keV He ions at the fluence of 1. 0 × 1017 ions·cm-2 and the sample temperature of 25~600 ℃. The depth of ion implantation has been simulated by SRIM. Micro-structural evolution of these irra-diated WC samples has been estimated by using the non -destructive conductive atomic force microscopy ( CAFM) . Measurement indicates that He bubbles are formed in the destroyed layer and lead to swelling of the sample surface.