真空
真空
진공
VACUUM
2014年
5期
32-35
,共4页
王金库%于红燕%葛楚鑫
王金庫%于紅燕%葛楚鑫
왕금고%우홍연%갈초흠
微小流导%微小气体流量%Knudsen’s minimum
微小流導%微小氣體流量%Knudsen’s minimum
미소류도%미소기체류량%Knudsen’s minimum
small conductance%small gas flow rate%Knudsen’s minimum
本文设计了一种基于活塞间隙的微小流导结构，流导数值可调，采用实验的方法研究了微小流导的压力特性、温度特性及调节重复性。讨论了该流导在微小气体流量计量的应用情况及前景。
本文設計瞭一種基于活塞間隙的微小流導結構，流導數值可調，採用實驗的方法研究瞭微小流導的壓力特性、溫度特性及調節重複性。討論瞭該流導在微小氣體流量計量的應用情況及前景。
본문설계료일충기우활새간극적미소류도결구，류도수치가조，채용실험적방법연구료미소류도적압력특성、온도특성급조절중복성。토론료해류도재미소기체류량계량적응용정황급전경。
A clearance of piston and cylinder was used as the throttle element for the small conductance. Its conductance value is changeable. The relations of conductance value with pressure, temperature were measured and also the repeatability when adjust the conductance. Application and prospect of this conductance were discussed.
