真空
真空
진공
VACUUM
2014年
5期
25-31
,共7页
等离子体清洗%PCB%直流辉光放电%真空度%高压电源
等離子體清洗%PCB%直流輝光放電%真空度%高壓電源
등리자체청세%PCB%직류휘광방전%진공도%고압전원
plasma cleaning%PCB%DC glow discharge%vacuum degree%high voltage power supply
本文介绍了干法清洗中发展较快、优势明显的等离子体清洗的机理、类型、工艺特点等。并根据在低气压下由直流辉光放电产生等离子体的方法，研制了一种适用于 PCB微切片清洗的等离子体清洗机，同时对该等离子体清洗机的真空系统、高压电源、控制过程的设计作出了详细的说明。
本文介紹瞭榦法清洗中髮展較快、優勢明顯的等離子體清洗的機理、類型、工藝特點等。併根據在低氣壓下由直流輝光放電產生等離子體的方法，研製瞭一種適用于 PCB微切片清洗的等離子體清洗機，同時對該等離子體清洗機的真空繫統、高壓電源、控製過程的設計作齣瞭詳細的說明。
본문개소료간법청세중발전교쾌、우세명현적등리자체청세적궤리、류형、공예특점등。병근거재저기압하유직류휘광방전산생등리자체적방법，연제료일충괄용우 PCB미절편청세적등리자체청세궤，동시대해등리자체청세궤적진공계통、고압전원、공제과정적설계작출료상세적설명。
This article introduces the principle, type and technological characteristics of plasma cleaning which experiences quick development and has obvious advantage in dry cleaning. A plasma cleaning machine suitable for PCB microsection cleaning had developed with the method which can produce plasma by DC glow discharge under low atrophic pressure. Detailed description was provided for the design of the vacuum system, high voltage power supply and control process of the plasma cleaning machine.
