CAJ | 학술논문

比较法校准真空标准漏孔是通过四极质谱计比较气体流量计提供的标准气体流量与被校真空标准漏孔产生的离子流获得校准值。主要介绍了比较法真空标准漏孔的校准方法、装置原理、校准过程及校准结果的处理等，并提出了减小测量不确定度的影响因素。
비교법교준진공표준루공시통과사겁질보계비교기체류량계제공적표준기체류량여피교진공표준루공산생적리자류획득교준치。주요개소료비교법진공표준루공적교준방법、장치원리、교준과정급교준결과적처리등，병제출료감소측량불학정도적영향인소。
Comparison calibration method is compared ion currents using quadruple mass spectrometer between standard gas flow by provided gas flowmeter and leak by provided calibrated vacuum reference leak .The leakage is gained.The calibra-tion method, apparatus principle, calibration results are introduced.The influence factor for reducing measurement uncer-tainty is provided.