CAJ | 학술논문

简述了研究膜层光学薄膜参数测量方法的必要性。详细介绍了各种测量方法的理论思想、测量准确度、测量范围。综合比较了各种测量方法的优缺点和适用性，研究了测量不同类型薄膜系统膜层光学薄膜参数的最佳测量方法。最后总结了膜层光学薄膜参数测量方法的发展，并提出了建议。
간술료연구막층광학박막삼수측량방법적필요성。상세개소료각충측량방법적이론사상、측량준학도、측량범위。종합비교료각충측량방법적우결점화괄용성，연구료측량불동류형박막계통막층광학박막삼수적최가측량방법。최후총결료막층광학박막삼수측량방법적발전，병제출료건의。
Necessity of method used in measuring optical film parameters was overviewed .Several measuring methods were introduced in detail with their theory,measuring accuracy and range analyzed.Advantages and disadvantages of various meth-ods were contrasted .The scopes of different methods were considered .It got the best measuring method for the different types of optical film.Finally, development of those methods was summarized.The suggestions were put forward.