真空与低温
真空與低溫
진공여저온
VACUUM AND CRYOGENICS
2013年
4期
195-202,213
,共9页
张玮%满卫东%涂昕%林晓棋
張瑋%滿衛東%塗昕%林曉棋
장위%만위동%도흔%림효기
石墨烯%化学气相沉积%衬底%生长机理
石墨烯%化學氣相沉積%襯底%生長機理
석묵희%화학기상침적%츤저%생장궤리
graphene%chemical vapor deposition%substrate%growth mechanism
石墨烯有独特的结构和优异的性能,在电子、信息、能源、材料和生物医药等领域都有着广阔的应用前景。为了更好的应用这种新型材料,如何大规模可控合成高质量石墨烯是一个必须克服的困难。相比与机械剥离法、化学氧化还原法和碳化硅表面外延生长法,化学气相沉积法( CVD)因其可以生长大面积高质量连续石墨烯膜而倍受关注。基于石墨烯的生长机理,从衬底材料的角度,综述了近几年衬底对CVD生长石墨烯的影响的研究进展。展望了衬底选择的发展新趋势。
石墨烯有獨特的結構和優異的性能,在電子、信息、能源、材料和生物醫藥等領域都有著廣闊的應用前景。為瞭更好的應用這種新型材料,如何大規模可控閤成高質量石墨烯是一箇必鬚剋服的睏難。相比與機械剝離法、化學氧化還原法和碳化硅錶麵外延生長法,化學氣相沉積法( CVD)因其可以生長大麵積高質量連續石墨烯膜而倍受關註。基于石墨烯的生長機理,從襯底材料的角度,綜述瞭近幾年襯底對CVD生長石墨烯的影響的研究進展。展望瞭襯底選擇的髮展新趨勢。
석묵희유독특적결구화우이적성능,재전자、신식、능원、재료화생물의약등영역도유착엄활적응용전경。위료경호적응용저충신형재료,여하대규모가공합성고질량석묵희시일개필수극복적곤난。상비여궤계박리법、화학양화환원법화탄화규표면외연생장법,화학기상침적법( CVD)인기가이생장대면적고질량련속석묵희막이배수관주。기우석묵희적생장궤리,종츤저재료적각도,종술료근궤년츤저대CVD생장석묵희적영향적연구진전。전망료츤저선택적발전신추세。
Graphene has a unique structure and excellent properties.It has broad application prospects in electronics, infor-mation, energy, materials and biomedicine and other fields.For a better application of this new material, how large quality-controlled synthesis of grapheme is a necessary overcome difficulties.Compared with the mechanical exfoliation, chemical ox-idation-reduction and epitaxial growth on SiC, chemical vapor deposition ( CVD) method has been receiving significant atten-tion because of it can grow high-quality large-area grapheme films.Based on the growth mechanism of grapheme , the recent substrates for CVD growth of grapheme research from the perspective of the substrate material is reviewed.Finally, the devel-opment of new trends in substrate selection are prospected.