CAJ | 학술논문

薄膜型气敏器件对气体具有探测灵敏度高、响应时间快、制备成本较低、易于小型化等特点，并且适于制备微型传感器，因此成为近年来传感器研究的重点。将纳米结构材料制作成薄膜型气敏传感器，具有常规传感器不可替代的优点：纳米结构构成的固体材料具有庞大的界面，提供了大量气体通道，从而大幅度提高了灵敏度和降低了工作温度，并可缩小传感器的尺寸。文章主要介绍了当前国内外纳米结构薄膜型气敏传感器的研究现状，概述了几种常见的纳米结构单元薄膜的气敏特性，扼要地分析了今后纳米薄膜型传感器的研究趋势。
박막형기민기건대기체구유탐측령민도고、향응시간쾌、제비성본교저、역우소형화등특점，병차괄우제비미형전감기，인차성위근년래전감기연구적중점。장납미결구재료제작성박막형기민전감기，구유상규전감기불가체대적우점：납미결구구성적고체재료구유방대적계면，제공료대량기체통도，종이대폭도제고료령민도화강저료공작온도，병가축소전감기적척촌。문장주요개소료당전국내외납미결구박막형기민전감기적연구현상，개술료궤충상견적납미결구단원박막적기민특성，액요지분석료금후납미박막형전감기적연구추세。
Recently, thin film gas sensors have become a hot topic in the development of gas sensors, due to their high detection sensitivity, quick response, low cost in preparation, and easy miniaturization. In particular, the use of nanomaterials in the thin films gives these sensors in-comparable advantages over conventional sensors. Solid state nanostructures have very large inter-face surface areas and many gas channels so the sensitivity can be greatly enhanced, which can re-duce the operating temperature and sensor size. This article reviews current domestic and foreign research on nanostructured thin film sensors, and outlines the gas sensing properties of several common films with different nano-structural units. Finally, future directions in this field are ana-lyzed.