CAJ | 학술논문

并行共焦测量技术的核心是将单点共焦测量变成多点同时扫描测量，从而使共焦测量速度显著提高。本文介绍了共焦测量技术原理，综述了用于并行共焦的并行光源技术，分析了这些方法的优点和不足。结合作者近年来的研究成果，重点阐述了基于微透镜阵列和数字微镜器件（DMD）产生并行光源的新方法。分析和研究了DMD的空间光调制机理，最终建立了一种单光源双光路并行像散共焦测量系统。
병행공초측량기술적핵심시장단점공초측량변성다점동시소묘측량，종이사공초측량속도현저제고。본문개소료공초측량기술원리，종술료용우병행공초적병행광원기술，분석료저사방법적우점화불족。결합작자근년래적연구성과，중점천술료기우미투경진렬화수자미경기건（DMD）산생병행광원적신방법。분석화연구료DMD적공간광조제궤리，최종건립료일충단광원쌍광로병행상산공초측량계통。
Parallel confocal measurement technology changes traditional simple scanning into a multi -spot scanning, and it will improve the efficiency of measurement significantly .In this paper, the working principle of confocal measurement technology is introduced and some methods to produce a parallel light source in the parallel confocal measurement are surveyed .Then, it analyzes the advantages and disadvantages of these methods.At last, it presents the latest research achievements , and describes new methods to produce the par-allel light source based on the micro lens array and the Digital Micro-lens Device(DMD).By analysis of the mechanism of spatial light modulation , it establishes a laser parallel astigmatism measuring system based on a parallel light source and dual beam paths .