核聚变与等离子体物理
覈聚變與等離子體物理
핵취변여등리자체물리
NUCLEAR FUSION AND PLASMA PHYSICS
2014年
2期
135-140
,共6页
曹曾%黄向玫%蔡潇%许正华%田培红%崔成和%高霄雁
曹曾%黃嚮玫%蔡瀟%許正華%田培紅%崔成和%高霄雁
조증%황향매%채소%허정화%전배홍%최성화%고소안
极限真空%漏气率%线性关系%动态流导法
極限真空%漏氣率%線性關繫%動態流導法
겁한진공%루기솔%선성관계%동태류도법
Ultimate vacuum%Leak rate%Linear dependence%Dynamic flow conductance
对所研制的质谱测量与分析系统进行了性能测试。烘烤后系统的极限真空达到了7.3×10-7Pa，总漏气率为3.84×10-9Pa.m3.s-1。上下球室之间的气体压力，以及漏孔的漏气率与高分辨四极质谱计的氦分压力均呈现了良好的线性关系。结果满足动态流导法真空校准的技术要求，为氘、氦混合气体的测量与分析提供了条件。
對所研製的質譜測量與分析繫統進行瞭性能測試。烘烤後繫統的極限真空達到瞭7.3×10-7Pa，總漏氣率為3.84×10-9Pa.m3.s-1。上下毬室之間的氣體壓力，以及漏孔的漏氣率與高分辨四極質譜計的氦分壓力均呈現瞭良好的線性關繫。結果滿足動態流導法真空校準的技術要求，為氘、氦混閤氣體的測量與分析提供瞭條件。
대소연제적질보측량여분석계통진행료성능측시。홍고후계통적겁한진공체도료7.3×10-7Pa，총루기솔위3.84×10-9Pa.m3.s-1。상하구실지간적기체압력，이급루공적루기솔여고분변사겁질보계적양분압력균정현료량호적선성관계。결과만족동태류도법진공교준적기술요구，위도、양혼합기체적측량여분석제공료조건。
The performance test of gas pressure measuring and analysis system for quadrupole mass spectrometer was carried out. The ultimate vacuum is 7.3×10-7Pa after the system was baked, and total leak rate is 3.84×10-9Pa.m3.s-1. The pressure relationship between upper and lower chamber is linear dependence. So is the relationship of the helium leak rate and partial pressure. The results meet the design requirements of dynamic flow conductance, and provide basic conditions for mass spectrograph analysis.
