CAJ | 학술논문

结合主动流动控制需求，针对研发的侧喷式微型压电合成射流器提出了一种加工工艺并进行了振动性能测试。主要的微加工工艺流程包括：采用体硅感应耦合等离子刻蚀技术加工喷口和腔体，硅-玻璃阳极键合，利用新的PZT刻蚀溶液对基于硅的PZT压电振膜图形化。引线键合并划片之后，对制作器件的压电振子进行了测试。结果表明，压电振子谐振频率为5kHz，中心处最大振幅为15.05μm，振动速率为472.2mm/s。压电振子的振幅和振动速率变化一致，同时受到驱动电压幅值和频率的影响。
결합주동류동공제수구，침대연발적측분식미형압전합성사류기제출료일충가공공예병진행료진동성능측시。주요적미가공공예류정포괄：채용체규감응우합등리자각식기술가공분구화강체，규-파리양겁건합，이용신적PZT각식용액대기우규적PZT압전진막도형화。인선건합병화편지후，대제작기건적압전진자진행료측시。결과표명，압전진자해진빈솔위5kHz，중심처최대진폭위15.05μm，진동속솔위472.2mm/s。압전진자적진폭화진동속솔변화일치，동시수도구동전압폭치화빈솔적영향。
A fabrication process for micro piezoelectric synthetic jet actuator with side nozzle was developed for active flow control, and the piezoelectric vibrator performance is measured. The main microfabrication process included the orifice and cavity fabrication of silicon wafer by inductive coupled plasma etching (ICP) method, the bonding of Si and glass by anodic bonding method, and the patterning of PZT vibration film on Si substrate using a kind of solution. The micro piezoelectric synthetic jet was obtained after wire bonding and dicing. The test results showed that the center amplitude and vibration velocity of piezoelectric vibrator are 15.05μm and 472.2mm/s at the resonant frequency 5kHz. They have same variation and are both affected by the amplitude and frequency of drive voltage.