航空精密制造技术
航空精密製造技術
항공정밀제조기술
AVIATION PRECISION MANUFACTURING TECHNOLOGY
2014年
3期
1-4
,共4页
电感耦合大气等离子体%抛光方法%熔石英
電感耦閤大氣等離子體%拋光方法%鎔石英
전감우합대기등리자체%포광방법%용석영
induction coupling atmosphere plasma%polishing method%quartz
采用电感耦合原理，在大气压条件下激发气体产生等离子体，通过等离子体中的活性粒子与材料表面原子发生化学反应，生成易挥发的气体，实现熔石英的稳定去除。大气等离子体抛光熔石英的去除函数为高斯型，在一定参数下，去除函数的形状与等离子体炬到工件表面的靶距有关，靶距越近，等离子体中的活性粒子数越多，材料去除率越高，反应在加工轨迹上就是去除深度越大，半峰全值越大。
採用電感耦閤原理，在大氣壓條件下激髮氣體產生等離子體，通過等離子體中的活性粒子與材料錶麵原子髮生化學反應，生成易揮髮的氣體，實現鎔石英的穩定去除。大氣等離子體拋光鎔石英的去除函數為高斯型，在一定參數下，去除函數的形狀與等離子體炬到工件錶麵的靶距有關，靶距越近，等離子體中的活性粒子數越多，材料去除率越高，反應在加工軌跡上就是去除深度越大，半峰全值越大。
채용전감우합원리，재대기압조건하격발기체산생등리자체，통과등리자체중적활성입자여재료표면원자발생화학반응，생성역휘발적기체，실현용석영적은정거제。대기등리자체포광용석영적거제함수위고사형，재일정삼수하，거제함수적형상여등리자체거도공건표면적파거유관，파거월근，등리자체중적활성입자수월다，재료거제솔월고，반응재가공궤적상취시거제심도월대，반봉전치월대。
The theory of induction coupling was used in atmospheric pressure toexcitated reactive gas achieve plasma gas. The chemical reaction was produced by the activeparticle in plasma with the atoms in material surface to create gaseousstuff, and then quartz is removed. The removal function of induction coupling of atmosphere plasma from Guass function. In any determinated parameters, the shape of the removal function have relationship with the distance between spout and workpiece. If the spout and workpiece are more closer, the number of reactive atoms are larger in the plasma. The machiningtrack are more deeper and the full width at half maximun are more larger.
