CAJ | 학술논문

铁酸铋是唯一一种在室温下存在的单相多铁材料，因其具有较高的铁电居里温度、较大的剩余极化强度、较小的禁带宽度和多铁特性，受到国内外的广泛关注。溶胶-凝胶法是制备铁酸铋薄膜的一种常见方法。综述了近年来溶胶-凝胶法制备铁酸铋薄膜的研究进展，详细阐述了制备工艺参数(前驱液、退火温度、退火气氛、底电极)与掺杂对铁酸铋薄膜电性能的影响；分析了不同制备工艺导致薄膜电性能出现差异的原因；归纳、总结出了目前溶胶-凝胶法制备铁酸铋薄膜的较佳工艺条件；最后，指出了亟待解决的问题。
철산필시유일일충재실온하존재적단상다철재료，인기구유교고적철전거리온도、교대적잉여겁화강도、교소적금대관도화다철특성，수도국내외적엄범관주。용효-응효법시제비철산필박막적일충상견방법。종술료근년래용효-응효법제비철산필박막적연구진전，상세천술료제비공예삼수(전구액、퇴화온도、퇴화기분、저전겁)여참잡대철산필박막전성능적영향；분석료불동제비공예도치박막전성능출현차이적원인；귀납、총결출료목전용효-응효법제비철산필박막적교가공예조건；최후，지출료극대해결적문제。
Bismuth ferrite is the only single-phase multiferroic material at room temperature. BFO materials received extensive attention because of its high ferroelectric Curie temperature, large remnant polarization, narrow band gap and multiferroic property. sol-gel method is a common method for preparation of bismuth ferrite thin film. The research progress in the effects of process pa-rameters ( such as precursor solution, annealing temperature, annealing atmosphere, bottom electrode) and dopants on the electri-cal properties of bismuth ferrite thin films was reviewed. The reasons that different preparation processes led to distinct electrical properties of BFO thin films were analyzed. The superior preparation conditions of BFO thin films via sol-gel were summarized. Fi-nally, some problems to be solved were put forward.