CAJ | 학술논문

目的：研究Si的掺入对VAlN硬质涂层机械性能的影响行为。方法利用双靶( V50 Al50靶与Si靶)磁控溅射沉积技术,保持V50 Al50靶的功率为一定值,通过控制Si靶的功率,获得Si含量不同的VAlSiN硬质涂层,分析涂层的成分、相组成、硬度及耐磨损性能。结果 Si在涂层中以Si3 N4非晶相存在,Si3 N4起到细化晶粒的作用,少量Si的掺入可使涂层的硬度与耐磨性能得到提升。但当Si大量掺入后,Si3 N4非晶相成为涂层中的主相,导致涂层的硬度与耐磨性能出现下降。结论少量Si的掺入有益于VAlN涂层机械性能的提升。
목적：연구Si적참입대VAlN경질도층궤계성능적영향행위。방법이용쌍파( V50 Al50파여Si파)자공천사침적기술,보지V50 Al50파적공솔위일정치,통과공제Si파적공솔,획득Si함량불동적VAlSiN경질도층,분석도층적성분、상조성、경도급내마손성능。결과 Si재도층중이Si3 N4비정상존재,Si3 N4기도세화정립적작용,소량Si적참입가사도층적경도여내마성능득도제승。단당Si대량참입후,Si3 N4비정상성위도층중적주상,도치도층적경도여내마성능출현하강。결론소량Si적참입유익우VAlN도층궤계성능적제승。
Objective To study the effect of silicon addition on mechanical properties of the VAlN hard coatings. Methods U-sing the two-target (V50Al50 target and Si target) magnetron co-sputtering machine to deposit the VAlSiN hard coatings. The sili-con content was adjusted by the power applied to the silicon target. Results The silicon added in the coatings was all in the Si3 N4 phase, which had a grain refining effect. When the silicon content was low, the mechanical properties ( both hardness and wear rate) of the coatings were improved. However, once the silicon content was higher than that, Si3 N4 became the main phase of the coatings, and the mechanical properties of the coatings turned worse. Conclusion Adding a little silicon to the VAlN hard coatings could improve their mechanical properties.