CAJ | 학술논문

运用朗缪尔探针诊断技术对同轴配对电子回旋共振产生等离子体磁场约束的影响进行了研究。在磁镜约束条件下，电子回旋共振源轴线附近等离子体的密度非常高，但是随着径向距离的增加等离子体的密度会迅速下降；而在会切磁场约束条件下，离子体的密度相对较低却分布均匀。这种趋势与电子温度和等离子体电势的情形类似，并且这种特性可应用于各种材料加工以满足不同的需求。
운용랑무이탐침진단기술대동축배대전자회선공진산생등리자체자장약속적영향진행료연구。재자경약속조건하，전자회선공진원축선부근등리자체적밀도비상고，단시수착경향거리적증가등리자체적밀도회신속하강；이재회절자장약속조건하，리자체적밀도상대교저각분포균균。저충추세여전자온도화등리자체전세적정형유사，병차저충특성가응용우각충재료가공이만족불동적수구。
Effects of magnetic field on confinement of the coaxial twined ECR plasmas were studied using the Langmuir probe diagnostic technique .Under the magnetic-mirror confinement , the plasma density was quite high in the vicinity of the axis of the ECR sources but it decreased rapidly with increasing radial distance ;while under the cusped field confinement , the density was lower but uniform .The trend was similar for the electron temperature and the plasma potential .This property may be utilized in materials processes to meet different requirements .