CAJ | 학술논문

有效评价圆弧刃金刚石刀具锋利度的关键是如何准确获取刃口形貌信息，基于此建立了以原子力显微镜（ Atomic Force Microscopy，AFM）和精密气浮主轴为核心部件的测量系统。为了评价系统的测量可靠性，对气浮主轴的回转误差进行了测试；对安装回转轴系后的AFM噪声和定位精度进行了测试，结果表明系统的静态噪声值约为5nm，主轴具有较高的定位精度。最后应用测量系统进行了圆弧刃金刚石刀具全刃口锋利度测量实验，首次从整体轮廓上对圆弧刃金刚石刀具的锋利度作出了评价，具有一定的实际意义，为金刚石刀具质量评价提供了参考。
유효평개원호인금강석도구봉리도적관건시여하준학획취인구형모신식，기우차건립료이원자력현미경（ Atomic Force Microscopy，AFM）화정밀기부주축위핵심부건적측량계통。위료평개계통적측량가고성，대기부주축적회전오차진행료측시；대안장회전축계후적AFM조성화정위정도진행료측시，결과표명계통적정태조성치약위5nm，주축구유교고적정위정도。최후응용측량계통진행료원호인금강석도구전인구봉리도측량실험，수차종정체륜곽상대원호인금강석도구적봉리도작출료평개，구유일정적실제의의，위금강석도구질량평개제공료삼고。
The key to effective evaluate arc sharpness of diamond tool is how to obtain edge information accurately ,so the measur-ing system whose core components are atomic force microscopy and precision gas flotation spindle is established on the basis of this.In order to evaluate the measurement of the system reliability ,the gas floating spindle rotary error were tested;after that the installation of rotary shaft noise and the accuracy of atomic force microscope have been tested ,and results indicate that the system static noise value of about five nanometers and the spindle has a high positioning accuracy .Finally,applied measuring system to measure all edge sharpness of the circular diamond tool .This is the first time that making evaluation from the whole contour on arc edge sharpness of the diamond tool ,and this has a certain practical significance which will provide reference for evaluating dia -mond quality .