CAJ | 학술논문

对日盲AlGaN光电探测器的光谱响应特性进行了仿真模拟，并将仿真结果与实测数据进行了比较分析，发现差异来自AlGaN材料的带尾效应。利用无p型层的材料透过率数据提取了器件吸收层截止波长附近的光吸收系数，并使用带尾吸收模型对测得的光吸收系数进行拟合，得到了AlGaN材料吸收带尾特征参数αg、EUrbach分别为2.2×104 cm-1、0.027 eV，补充和修正了AlGaN材料带内外光吸收模型，经验证使用该模型的仿真结果与实测结果具有很好的一致性。
대일맹AlGaN광전탐측기적광보향응특성진행료방진모의，병장방진결과여실측수거진행료비교분석，발현차이래자AlGaN재료적대미효응。이용무p형층적재료투과솔수거제취료기건흡수층절지파장부근적광흡수계수，병사용대미흡수모형대측득적광흡수계수진행의합，득도료AlGaN재료흡수대미특정삼수αg、EUrbach분별위2.2×104 cm-1、0.027 eV，보충화수정료AlGaN재료대내외광흡수모형，경험증사용해모형적방진결과여실측결과구유흔호적일치성。
In this paper, the spectral response of the solar-blind AlGaN photodetectors was simulated and compared with the testing result, which indicated that the difference came from the Urbach effect. The absorption coefficient of the i-layer was extracted from the transmittance data of the device without P-layers, and the Urbach tail parameter αg, EUrbach of AlGaN were figured out after curve-fitting, which were 2.2×104 cm-1 and 0.027 eV respectively. Good consistency was obtained between the simulation and the measured results for spectral response based on the modified absorption model.