CAJ | 학술논문

利用紫外固化材料SU-82005与热交联聚合物甲基丙烯酸甲酯一甲基丙烯酸缩水甘油酯[P（MMA—GMA）]分别作为波导芯层和包层材料，通过直接光刻技术，成功实现了厚度为5μm，宽度为9μm，光栅高度为4μm的起伏型高阶布拉格波导光栅滤波器。对光栅器件的谐振波长，光透射率等重要参数进行了模拟设计。测得制备的聚合物高阶布拉格波导光栅滤波器的谐振波长为1550．4nm，消光比为23dB，3-dB带宽为2nm。
이용자외고화재료SU-82005여열교련취합물갑기병희산갑지일갑기병희산축수감유지[P（MMA—GMA）]분별작위파도심층화포층재료，통과직접광각기술，성공실현료후도위5μm，관도위9μm，광책고도위4μm적기복형고계포랍격파도광책려파기。대광책기건적해진파장，광투사솔등중요삼수진행료모의설계。측득제비적취합물고계포랍격파도광책려파기적해진파장위1550．4nm，소광비위23dB，3-dB대관위2nm。
Ultraviolet curable material SU-8 2005 and thermal crosslinked polymer Methyl Methacrylatel Glyci- dyl Methacrylate[ P(MMA-GMA) ] are used as the core and the cladding layer materials, respectively, and a novel high-order Bragg waveguide grating filter with a thickness of 5 μm, a width of 9 μm and a grating height of 4 μm is successfully designed and fabricated by direct photolithography technique. The characteristic pa- rameters including resonance wavelength and transmissivity are carefully simulated. The performance parame- ters of fabricated device are measured to obtain the resonance wavelength of 1 550.4 nm, the extinction ratio of 23 dB and the 3-dB bandwidth of 2 nm.