吉林化工学院学报
吉林化工學院學報
길림화공학원학보
JOURNAL OF JILIN INSTITUTE OF CHEMICAL TECHNOLOGY
2012年
11期
45-47
,共3页
孟磊%刘玉芹%王金铃%徐娜
孟磊%劉玉芹%王金鈴%徐娜
맹뢰%류옥근%왕금령%서나
化学增幅%光致抗蚀剂%光产酸剂
化學增幅%光緻抗蝕劑%光產痠劑
화학증폭%광치항식제%광산산제
chemically amplify%photoresists%photoacid generators
综述了用于化学增幅型光致抗蚀剂的光产酸剂及机理，对于几种常用的离子型和非离子型光产酸剂分别进行了阐述，并对其特性和应用做了简单介绍．
綜述瞭用于化學增幅型光緻抗蝕劑的光產痠劑及機理，對于幾種常用的離子型和非離子型光產痠劑分彆進行瞭闡述，併對其特性和應用做瞭簡單介紹．
종술료용우화학증폭형광치항식제적광산산제급궤리，대우궤충상용적리자형화비리자형광산산제분별진행료천술，병대기특성화응용주료간단개소．
Various kinds of photoacid generators for chemically amplified photoresists and their reaction mechanism of acid amplification are reviewed. The characteristics and application of these materials are also introduced.
